Resonance Characteristics of Piezoelectric Resonator Based on Digital Driving Circuit of Field-Programmable Gate Array

Piezoelectric resonators are widely used in frequency reference devices, mass sensors, resonant sensors(such as gyros and accelerometers), etc. Piezoelectric resonators usually work in a special resonant mode. Obtaining working resonant mode with high quality is key to improve the performance of piezoelectric resonators. In this paper, the resonance characteristics of a rectangular lead zirconium titanate(PZT) piezoelectric resonator are studied. On the basis of the field-programmable gate array(FPGA) embedded system, direct digital synthesizer(DDS) and automatic gain controller(AGC) are used to generate the driving signals with precisely adjustable frequency and amplitude. The driving signals are used to excite the piezoelectric resonator to the working vibration mode. The influence of the connection of driving electrodes and voltage amplitude on the vibration of the resonator is studied. The quality factor and vibration linearity of the resonator are studied with various driving methods mentioned in this paper. The resonator reaches resonant mode at 330 kHz by different driving methods.The relationship between resonant amplitude and driving signal amplitude is linear. The quality factor reaches over 150 by different driving methods. The results provide a theoretical reference for the efficient excitation of the piezoelectric resonator.     

Capacitance Sensing and Software-Realized Lock-in Amplifier for the Electromagnetically Levitated Micro Gyroscope

In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock-in amplifier was employed in the capacitance detection to restrain the noise interference.The capacitance analysis shows that 1 fF capacitance variation corresponds to 0.1 degree of the turn angle.The differential capacitance bridge and the charge integral amplifier were used as the front signal input interface.In the implementation of digital lock-in amplifier,a new routine which warranted the exactly matching of the reference phase to signal phase was proposed.The result of the experiment shows that digital lock-in amplifier can greatly eliminate the noise in the output signal.The non linearity of the turn angle output is 2.3% and the minimum resolution of turn angle is 0.04 degrees.The application of the software demodulation in the signal detection of micro-electro-mechanical-system(MEMS)device is a new attempt,and it shows the prospective for a high-performance application.