| ENHANCING ADHESION OF TETRAHEDRAL AMORPHOUS CARBON FILMS |
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| 引用本文： | 赵玉清 林毅 王晓艳 王炎武 魏新宇. ENHANCING ADHESION OF TETRAHEDRAL AMORPHOUS CARBON FILMS[J]. 西安交通大学学报(英文版), 2005, 17(1): 33-35,39 |
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| 作者姓名： | 赵玉清 林毅 王晓艳 王炎武 魏新宇 |
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| 作者单位： | School of Electronic and Information Engineering，Xi'an Jiaotong University，School of Electronic and Information Engineering，Xi'an Jiaotong University，School of Electronic and Information Engineering，Xi'an Jiaotong University，School of Electronic and Information Engineering，Xi'an Jiaotong University，School of Electronic and Information Engineering，Xi'an Jiaotong University Xi'an 710049，China，Xi'an 710049，China，Xi'an 710049，China，Xi'an 710049，China，Xi'an 710049，China |
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| 摘 要： | TheperformanceoftheTACfilmsdeposited bytheFCVAisbetterthanthatofthediamond like carbonfilms[1,2],becausetheformerisofhigher hardnessandtransparency,smallerfriction coefficientandabsorbingtheultravioletraymore easily,etc.[3].Thesecharacteristicsaresimilart…
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| 关 键 词： | 四面无定形碳 阴极真空电弧 离子轰击 附着力 |
ENHANCING ADHESION OF TETRAHEDRAL AMORPHOUS CARBON FILMS |
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| Zhao yuqing,Lin Yi,Wang Xiaoyan,Wang Yanwu,Wei Xinyu. ENHANCING ADHESION OF TETRAHEDRAL AMORPHOUS CARBON FILMS[J]. Academic Journal of Xi’an Jiaotong University, 2005, 17(1): 33-35,39 |
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| Authors: | Zhao yuqing Lin Yi Wang Xiaoyan Wang Yanwu Wei Xinyu |
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| Affiliation: | School of Electronic and Information Engineering, Xi'an Jiaotong University, Xi'an 710049, China |
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| Abstract: | Objective The high energy ion bombardment technique is applied to enhancing the adhesion of the tetrahedral amorphous carbon (TAC) films deposited by the filtered cathode vacuum arc (FCVA). Methods The abrasion method, scratch method, heating and shaking method as well as boiling salt solution method is used to test the adhesion of the TAC films on various material substrates. Results The test results show that the adhesion is increased as the ion bombardment energy increases. However, if the bombardment energy were over the corresponding optimum value, the adhesion would be enhanced very slowly for the harder material substrates and drops quickly, for the softer ones. Conclusion The optimum values of the ion bombardment energy are larger for the harder materials than that for the softer ones. |
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| Keywords: | tetrahedral amorphous carbon filtered cathode vacuum arc ion bombardment adhesion |
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