Monte Carlo simulation of electron swarms parameters in c-C4F8/CF4 gas mixtures

The swarm parametes for c-C₄F₈/CF₄ mixtures, including the density-normalized effective ionization coefficient, drift velocity and mean energy were calculated using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied between 150 and 500 Td, while the c-C₄F₈ content in gas mixtures is varied in the range of 0–100%. The value of the density-normalized effective ionization coefficient shows a strong dependence on the c-C₄F₈ content, becoming more electronegative as the content of c-C₄F₈ is increased. The drift velocity of c-C₄F₈/CF₄ mixtures is more affected by CF₄. The calculated limiting field strength for c-C₄F₈/CF₄ mixtures is higher than that of SF₆/CF₄. Foundation item: the National Natural Science Foundation of China (No. 50777041)