离子束增强沉积TiN薄膜的耐蚀性

采用不同离子束入射方向的离子束增强沉积技术（IBED）在W18Cr4V高速钢表面沉积TiN薄膜.利用阳极极化曲线测试技术研究TiN薄膜在0.5mol/L H2SO4和3％ NaCl溶液中的耐蚀性.结果表明：在0.5mol/LH2SO4溶液中,离子束入射角度为45°时的TiN薄膜的阳极极化曲线呈现自钝化,自腐蚀电位Ecorr由原始高速钢的-400 mV增至-71 mV,致钝电流密度ib和维钝电流密度ip分别比原始试样降低4个和2个数量级,耐蚀性能显著提高.在3％ NaCl溶液中,离子束入射角度分别为0°、30°沉积的TiN薄膜的阳极极化曲线均呈现自钝化-点蚀击穿过程,随着入射角度的增加,自腐蚀电位和点蚀击穿电位升高,入射角度为45°时的TiN薄膜不发生点蚀破坏,自腐蚀电位Ecorr由原始高速钢的-600 mV增至-10 mV,具有高的抗点蚀性能.

Corrosion Resistance of TiN Films on W18Cr4V Steel by IBED

A TiN films on W18Cr4V steel were prepared by ion beam enhanced deposition in different incident angles.The corrosion resistance of the TiN films was studied by using anodic polarization measurements in 0.5 mol/L H2SO4and 3％ NaCl solutions respectively.The results indicate that when the angle of incidence is 45°,the anodic polarization curve of the TiN films has self-passivation process in the 0.5 mol/L H2SO4 solution.Compared with the original sample,the corrosion potential and the passivation current density of the TiN films increased from-400 mV to-71 mV and decreased approximately 2 orders of magnitude respectively.In 3％ NaCl solution,the anodic polarization curve of the TiN films has no pitting corrosion with the higher corrosion potential of-10 mV than that of-600 mV for the original sample,which means corrosion resistance of the TiN films is greatly improved.