| 一种新型精密三维工作台的设计及其应用 |
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| 引用本文： | 陈育荣,杨旭东,谢铁邦.一种新型精密三维工作台的设计及其应用[J].湖北汽车工业学院学报,2007,21(3):25-28. |
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| 作者姓名： | 陈育荣 杨旭东 谢铁邦 |
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| 作者单位： | 湖北汽车工业学院,湖北,十堰,442002 |
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| 基金项目： | 湖北省自然科学基金项目(2006ABA040) |
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| 摘 要： | 介绍了一种新型的基于垂直扫描的精密三维工作台,由一个自带计量系统的二维工作台和一个垂直扫描工作台组成。当测量工件时,闭环控制系统控制二维工作台的位移,同时Z方向伺服电机和压电陶瓷驱动器驱动垂直扫描工作台去实现垂直方向上的精确定位。衍射光栅位移传感器用于探测垂直扫描工作台的垂直位移量。
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| 关 键 词： | 三维精密工作台 垂直扫描 表面形貌测量 |
| 文章编号： | 1008-5483(2007)03-0025-04 |
| 修稿时间： | 2007年7月10日 |
Design and Application of a Novel Precision Three-dimensional Platform |
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| Chen Yurong,Yang Xudong,Xie Tiebang.Design and Application of a Novel Precision Three-dimensional Platform[J].Journal of Hubei Automotive Industries Institute,2007,21(3):25-28. |
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| Authors: | Chen Yurong Yang Xudong Xie Tiebang |
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| Abstract: | This paper presents a novel precision three-dimensional platform based on vertical scanning that has practical application in surface topography measurement.The three-dimensional precision platform is composed of a two-dimensional platform with metrology system and a vertical scanning platform.When the workpiece is measured,the closed loop control system controls the two-dimensional platform.Meanwhile,the Z direction servo motor and the piezoelectric actuator drive the vertical scanning platform to move vertically to realize the fine displacement.The diffraction grating displacement sensor detects the vertical relative displacement of the vertical scanning platform. |
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| Keywords: | three-dimensional precision platform vertical scanning surface topography measurement |
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