| Abstract: | Nonlinearity is an important characteristic in electrostatic suspension system (ESS). This paper concludes the nonlinear parts in ESS, which generally result from the relationships between rotor displacement and capacitance, rotor displacement and electrostatic force, and control voltage and electrostatic force. In terms of the nonlinearities, a new control method with modified internal model control (IMC) was proposed to analyze the ESS, deduce the transfer function of the modified IMC controller in ESS, and simulate this new application in ESS. Comparing with proportional integral derivative (PID) control, IMC has only a parameter, and has better performance. As a result, IMC solves nonlinearity error well in ESS with only one uncertain parameter, and performs well when the rotor has large displacement. |
