KEY TECHNOLOGY FOR PRACTICAL 1-mm-DIAMETER ELECTROMAGNETIC MICROMOTOR

IntroductionThe development of microfabricated motors hasbecome an expanding field in microtechnology.The efforts have been concentrated on the use ofelectrical forces,mostly with electrostaticdrive1～ 7] .Electrostatic micromotors with typi-cal rotor diameters of1 0 0 μm have been fabricat-ed entirely by planar IC- processes.Their maindrawbacks are small output torque( 1 0 -9N· m-scale) and high driving voltage( about1 0 0 V) .In contrast,electromagnetic drives which are ef-ficient as th…

KEY TECHNOLOGY FOR PRACTICAL 1-mm-DIAMETER ELECTROMAGNETIC MICROMOTOR

A l-mm-diameter electromagnetic micromotor was developed as a crux component for MEMS application. The motor has a novel layer structure with a 1-mm-diameter rotor in the middle of two stators with the same size. The stator uses multiple layers, slotless and concentrated planar winding. The rotor adopts multipolar permanent magnet with high performance. Ruby bearing is used to prolong operating lifetime of the micromotor. The stator winding, consisting of 6-layer coils, 42 turns, and 9 pairs, is fabricated with microprocessing techniques. The micromotor has long operation lifetime, its running speed is stable and controllable, and rotational direction can be easily reversed. Maximum achieved rotational speed of 18000 r/min with maximum output torque of 1. 5 μ N . m has been obtained. This paper presented the key technology for developing this kind of micromotor including the design of structure, magnetic circuit, heat problem, friction improvement, microprocessing techniques, and so on.