Tool sequence optimization based on three logical modes of robot control via CPLEX optimization |
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Authors: | Liang-liang Sun Wei Liu Tian-you Chai |
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Institution: | [1]Manufacturing Computing Laboratory, Electrical Engineering Department, University of Connecticut Storrs Connecticut 06269, USA [2]Key Laboratory of Integrated Automation of Process Industry, Northeastern University, Shenyang 110004, China |
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Abstract: | Cluster tools have advantages of shorter cycle times, faster process development, and better yield for less contamination.
The sequence of dual-arm cluster tools is a complex logistics process during the semiconductor production. Efficient use of
cluster tools is naturally very significant to competitive fab operations. Generating an optimized sequence in a computationally
efficient manner and assessing the quality of the requirements to improve the fab production are the key factors for semiconductor
manufacturing productivity. The Petri net modeling is introduced to minimize the makespan of the process for the three different
logical modes and select a better mode after comparing the makespan among the three logical modes. The tool sequence optimization
problem is formulated as optimization firing transition sequences based on the Petri net and then the formulation is converted
to be linearly solved by the branch-and-cut method in the standard commercial solver CPLEX. Special methods for the linear
conversion are highlighted. Due to the limited calculation time requirement for the real production and the large scale of
the problem, special methods for the efficiency tuning are applied according to the characteristics of the problem. Numerical
testing is supported by one of the most advanced semiconductor enterprises and the computational results show significant
improvement compared with the traditional manual sequence results. |
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