| TiO薄膜的多弧离子制备及表征 |
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| 引用本文： | 范多进,范多旺,王成龙,刘红忠.TiO薄膜的多弧离子制备及表征[J].兰州铁道学院学报,2007,26(6). |
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| 作者姓名： | 范多进 范多旺 王成龙 刘红忠 |
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| 基金项目： | National Science Support Program，MOE IRT，国家自然科学基金，国家高技术研究发展计划(863计划) |
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| 摘 要： |
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Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance |
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| Fan Duojin,Fan Duowang,Wang Chenglong,Liu Hongzhong.Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance[J].Journal of Lanzhou Railway University,2007,26(6). |
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| Authors: | Fan Duojin Fan Duowang Wang Chenglong Liu Hongzhong |
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| Abstract: | Experimental Procedure Fig. 1 shows the custom-made Cathode Multi Arc Ion equipment, which is made up of three pars:CCS(computer contral system, Fig. 1's left part), Vacuum Chamber (Fig. 1's middle part) and Air Pump parts(Fig. 1's right part). |
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