W 含量对 ZrAlWN 复合膜微结构、力学性能和摩擦磨损性能的影响

采用反应磁控溅射法沉积了一系列不同 W 含量的 ZrAlWN 复合膜，利用扫描电子显微镜、X 射线衍射仪、纳米压痕仪和摩擦磨损仪研究了复合膜的微结构、力学性能和摩擦磨损性能。研究表明，当 W 的原子百分含量小于30.19%时， ZrAlWN 薄膜与 ZrAlN 薄膜微结构相似，为 fcc - ZrAlWN ＋ hcp - AlN 两相共存；当 W 的原子百分含量在30.19%~36.05%时，AlN（110）衍射峰消失，薄膜中出现了 fcc - W2 N（111）和（200）衍射峰，此时薄膜为 fcc - ZrAlWN ＋ fcc - W2 N 结构；随着W 的含量进一步升高，薄膜出现 fcc - W（200）衍射峰，此时薄膜为 fcc - ZrAlWN ＋ fcc - W2 N ＋ fcc - W 三相共存。随着 W含量的增加，复合膜的硬度先增大后减小，当 W 的原子百分含量为30.19%时，硬度高达26.70 GPa.常温下，随 W 含量的增加，复合膜的摩擦系数先升高后降低，但磨损率逐渐减小；高温下，复合膜的摩擦系数随着温度的升高先增大后减小，当温度为700℃时，摩擦系数为0.51.文中还讨论了不同温度下 ZrAlWN 薄膜的摩擦机理.

Microstructure,mechanical and tribological properties of ZrAlWN composite films with different W content

A series of ZrAlWN nano-composite films with different W content was synthesized by reactive magne-tron sputtering technique. The microstructure,mechanical and tribological properties of ZrAlWN films were in-vestigated by X - ray diffraction,nano-indentation and high-temperature ball-on-disc tribo-meter technology. The results showed that ZrAlWN film exhibited the fcc - ZrAlWN ＋ hcp - AlN structure if W content was lower than 30. 19% ;as W content was 30. 19% ~ 36. 05% ,AlN（110）disappeared and fcc - W2 N（111）（200）ap-peared,and the film exhibited the fcc - ZrAlWN ＋ fcc - W2 N structure;when W content was above 36. 05at. % , fcc - W（200）appeared and the film exhibited the fcc - ZrAlWN ＋ fcc - W2 N ＋ fcc - W structure. The hardness of the ZrAlWN films increased and then decreased with increasing W content and the highest value was 26. 70 GPa,30. 19% W. At room temperature,the friction coefficient of the ZrAlWN films increased and then de-creased with increasing W content,while wear rate decreased gradually. At elevated temperature,the friction co-efficient of ZrAlWN films increased and then decreased. The friction coefficient was 0. 57 at 700℃. The tribo-logical property of ZrAlWN films at different temperatures was discussed.