| 微机电系统的发展现状和应用 |
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| 引用本文： | 胡雪梅,吕俊霞.微机电系统的发展现状和应用[J].机电设备,2005,22(6):I0041-I0044. |
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| 作者姓名： | 胡雪梅 吕俊霞 |
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| 作者单位： | 1. 西安电子科技大学,机电工程学院,西安,710071
2. 河南工业职工技术学院,南阳,473009 |
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| 摘 要： | 微机电系统是一项20世纪末兴起、21世纪初开始快速发展起来的高新技术,该文介绍了微机电系统的起源和特点,对微机电系统的加工技术、封装技术、测试技术、应用、国内发展现状及发展前景进行了较全面的论述．
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| 关 键 词： | 微机电系统(MEMS) 微加工技术 应用 前景 |
| 文章编号： | 1005-8354(2005)06-0041-04 |
| 收稿时间： | 2005-09-19 |
Development and Application of Micro Electromechanical System (MEMS) |
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| HU Xue-mei,LV Jun-xia.Development and Application of Micro Electromechanical System (MEMS)[J].Mechanical and Electrical Equipment,2005,22(6):I0041-I0044. |
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| Authors: | HU Xue-mei LV Jun-xia |
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| Abstract: | Micro electromechanical system is a new high technology. It rose at the end of 20fh century and has been being developed fast at the beginning of 21st century. The paper introduces its provenance and characteristics and relates in the round its correlative technology of micromachining, packaging and testing, application, domestic status and theprospects of its development. |
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| Keywords: | micro electromechanical system (MEMS) micromachining application prospect |
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