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Cluster tools have advantages of shorter cycle times, faster process development, and better yield for less contamination.
The sequence of dual-arm cluster tools is a complex logistics process during the semiconductor production. Efficient use of
cluster tools is naturally very significant to competitive fab operations. Generating an optimized sequence in a computationally
efficient manner and assessing the quality of the requirements to improve the fab production are the key factors for semiconductor
manufacturing productivity. The Petri net modeling is introduced to minimize the makespan of the process for the three different
logical modes and select a better mode after comparing the makespan among the three logical modes. The tool sequence optimization
problem is formulated as optimization firing transition sequences based on the Petri net and then the formulation is converted
to be linearly solved by the branch-and-cut method in the standard commercial solver CPLEX. Special methods for the linear
conversion are highlighted. Due to the limited calculation time requirement for the real production and the large scale of
the problem, special methods for the efficiency tuning are applied according to the characteristics of the problem. Numerical
testing is supported by one of the most advanced semiconductor enterprises and the computational results show significant
improvement compared with the traditional manual sequence results. 相似文献
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绿色和平组织报告指出:过去30年,共有超过1万件海上油轮事故发生,约600万吨浮油于海上漂流;近50年来,全世界因油类污染己使1000多种海洋生物灭绝。文章以最新国际统计资料来说明目前油轮污染的严重性,并阐述航运发达国家防油轮污染政策,并在此基础上提出相关预防对策及措施。 相似文献
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在隧道塌方治理中,由于围岩地质的特殊性,无法采用常规支护治理措施确保施工安全,因此水平旋喷高压劈裂技术的应用,可确保安全快速的通过塌方段。结合包西铁路新九燕山隧道一大型塌方段的综合治理,阐述了在饱水黏土层塌方体中的种综合治理措施、水平旋喷高压劈裂注浆的加固机理和施工作用,可为类似的工程加固施工提供借鉴和参考。 相似文献
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介绍了一种新型舰船用管路通舱装置的研制、试验过程、特点及其应用情况,对该装置进行了多达21项试验,表明其耐火性能和密封性能指标均达到国际先进水平,具有良好的应用价值。 相似文献
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Jong-Hwi Seo Seok-Won Kim Il-Ho Jung Tae-Won Park Jin-Yong Mok Young-Guk Kim Jang-Bom Chai 《Vehicle System Dynamics: International Journal of Vehicle Mechanics and Mobility》2006,44(8):615-630
The dynamic interaction between the catenary and the pantographs of high-speed trains is a very important factor that affects the stable electric power supply. In order to design a reliable current collection system, a multibody simulation model can provide an efficient and economical method to analyze the dynamic behavior of the catenary and pantograph. In this article, a dynamic analysis method for a pantograph-catenary system for a high-speed train is presented, employing absolute nodal coordinates and rigid body reference coordinates. The highly flexible catenary is modeled using a nonlinear continuous beam element, which is based on an absolute nodal coordinate formulation. The pantograph is modeled as a rigid multibody system. The analysis results are compared with experimental data obtained from a running high-speed train. In addition, using a derived system equation of motion, the calculation method for the dynamic stress in the catenary conductor is presented. This study may have significance in providing an example that a structural and multibody dynamics model can be unified into one numerical system. 相似文献
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船舶液货控制技术探讨 总被引:2,自引:0,他引:2
确保装载危险品的液货船安全运输与高效装卸。是此类液货船舶的关键技术之一。本文就如何运用计算机局域网的现场总线技术对液货系统进行安全监测与控制作一探讨。 相似文献
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