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This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments. 相似文献
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A multi-try counter-meshing gears (CMG) discrimination device based on micro electromechani-cal system (MEMS) technology was designed for some specified information fields. The discrimination deviceconsists of two groups of metal CMG, two pawl/ratchet mechanisms, two driving micromotors and two re-setting micromotors, which make the CMG withdraw by raising the pawls. The energy-coupling element isa photoelectric sensor with a circular plate which is notched. Micromotor is fabricated using the ultravioletLiGA (UV-LiGA) fabrication process and precision mechanical engineering. The discrimination device has thefunction which can automatically reset, with the correct resetting code, it can be tried another times. 相似文献
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The 3D model of flapping wing mechanism and veins is constructed in 3D computer aided design (CAD) software UG. Then the co-simulation model is established by using multibody dynamics software ADAMS and MATLAB. The validation of this co-simulation model is verified by comparing the simulation results with final experiments. The simulation results and experiments reveal that the relation between flapping frequency and driving voltage of motor is approximately linear under various wingspans. The variance of flapping frequency among different wingspans augments gradually with increasing voltage. Furthermore, the simulation results sug-gest that flapping frequency is sensitive to wingspan and decreases with increasing wingspan of veins, and the relation between flapping frequency and moment of inertia of veins is also approximately linear for various volt-ages. 相似文献
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本文介绍了CTZ型船用无油润滑氦气增压机的结构型式,基本参数,关键技术及自动控制。该机具有小型化,泄漏少等特点,且能在多工况下实现正常运转,以满足不同深度潜水作用的需要。 相似文献
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采用非线性的Morision方程,计算了考虑流固耦合时,不同的桥墩在波浪荷载、地震作用下的位移响应,比较了考虑流固耦合和不考虑流固耦合时桥墩的位移响应差异。算例表明,不考虑流固耦合时的计算结果明显小于考虑流固耦合时的计算结果。因此,分析认为,在地震、波浪作用下考虑流固耦合的分析更符合实际情况。 相似文献
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A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems (MEMS) accelerometers (instead of gyroscope), which is employed in 3D mouse system. To sense 3D angular motion, the static property of MEMS accelerometer, sensitive to gravity acceleration, is exploited. With the three outputs of configured accelerometers, the proposed model is implemented to get the rotary motion of the rigid object. In order to validate the effectiveness of the proposed model, an input device is developed with the configuration of the scheme. Experimental results show that a simulated 3D cube can accurately track the rotation of the input device. The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system. 相似文献
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In the novel prototype of micro-gyroscope structure,the new configured capacitance sensing scheme for the micro gyroscope was analyzed and the virtual instrument based detection scheme was implemented.The digital lock-in amplifier was employed in the capacitance detection to restrain the noise interference.The capacitance analysis shows that 1 fF capacitance variation corresponds to 0.1 degree of the turn angle.The differential capacitance bridge and the charge integral amplifier were used as the front signal input interface.In the implementation of digital lock-in amplifier,a new routine which warranted the exactly matching of the reference phase to signal phase was proposed.The result of the experiment shows that digital lock-in amplifier can greatly eliminate the noise in the output signal.The non linearity of the turn angle output is 2.3% and the minimum resolution of turn angle is 0.04 degrees.The application of the software demodulation in the signal detection of micro-electro-mechanical-system(MEMS)device is a new attempt,and it shows the prospective for a high-performance application. 相似文献