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The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage (UPMS) with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm.  相似文献   
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随着现代医院管理系统的信息化进程逐步加快,检验部门的信息管理成为医院管理系统领域目前和今后一段时期内研究、开发和推广应用的重要课题.建立了一种新型的临床检验信息系统的设计方案,实现了实验室检验信息的数据传输、查询等多方面功能,达到了科学高效地管理实验室信息,使检验科服务水准有了明显提高.  相似文献   
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