排序方式: 共有9条查询结果,搜索用时 15 毫秒
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分析了新体制侦察测向装备总体战术需求,探讨了全波段侦察测向设备一体化的可行性方案。最后给出全波段通用的一体化侦察测向设备工作模式及其特征。 相似文献
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The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage (UPMS) with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm. 相似文献
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针对传统的丝杠精度静态检测方法测量效率低、人为误差大的特点,设计了以双频激光干涉仪作为长度基准,圆光栅作为角度基准的丝杠精度动态检测系统.根据行业相关标准,简化行程变动量的求解过程,对丝杠的导程误差进行描述,并通过轴向位置数学模型对检测系统的不确定度进行了分析,为判定系统的检测精度提供了依据.试验表明系统可以对丝杠副进行准确快速的精度检测,其不确定度为2μm/m. 相似文献
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利用RenisawML10激光干涉仪测量机床误差,采用九线法对三轴数控机床误差参数进行辨识,结合具体机床,准确建立了误差补偿的数学模型,利用误差补偿软件实现了误差补偿,显著地提高了数控机床的加工精度. 相似文献
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