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Monte Carlo Simulation of Electron Swarms Parameters in c-C4F8/CF4 Gas Mixtures
Authors:LIU Xue-li  XIAO Deng-ming  WANG Yan-an  ZHANG Zhou-sheng
Abstract:The swarm parametes for c-C4F8/CF4 mixtures, including the density-normalized effective ionization coefficient, drift velocity and mean energy were calculated using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied between 150 and 500 Td,while the c-C4F8 content in gas mixtures is varied in the range of 0-100%. The value of the density-normalize deffective ionization coefficient shows a strong dependence on the c-C4F8 content, becoming more electronegative as the content of c-C4F8 is increased. The drift velocity of c-C4F4/CF4 mixtures is more affected by CF4. The calculated limiting field strength for c-C4F8/CF4 mixtures is higher than that of SF6/CF4.
Keywords:electron swarm parameters  c-C4F8/CF4 gas mixtures  Monte-Carlo technique
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