| 高分辨率双频激光回馈的位移测量方法 |
| |
| 引用本文： | 张立,;吴云,;周鲁飞,;张书练. 高分辨率双频激光回馈的位移测量方法[J]. 北方交通大学学报, 2009, 0(6): 9-12 |
| |
| 作者姓名： | 张立, 吴云, 周鲁飞, 张书练 |
| |
| 作者单位： | [1]北京交通大学理学院,北京100044; [2]清华大学精密测试技术及仪器国家重点实验室,北京100084 |
| |
| 基金项目： | 国家自然科学基金资助项目（60827006） |
| |
| 摘 要： | 在分析双频激光回馈测量原理的基础上，提出了一种基于双频激光回馈原理的高精度位移测量方法，研究了双频激光回馈的基本现象并给出了理论依据，进一步在回馈光学系统基础上，对两路正交的光回馈条纹，利用电路进行细分处理：即5细分和4倍频电路相结合，细分产生的计数脉冲最后送入单片机进行计算及显示．采用可编程逻辑器件FPGA和单片机设计信号处理电路，利用FPGA实现4倍频细分，利用电阻链细分实现5细分．全部电路通过逻辑、时序仿真，验证了本方法的可行性．目前此系统可满足高精度位移测量的要求．
|
| 关 键 词： | 位移测量 双频激光 光回馈 细分 |
Dual-Frequency Laser Optical Feedback Displacement Measurement System with High Resolution |
| |
| Affiliation: | ZHANG Li, WU Yun,ZHOU Lufei, ZHANG Shulian ( 1. School of Science, Beijing Jiaotong University Beijing 100044, China; 2. The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100054, China) |
| |
| Abstract: | A high-resolution displacement measurement system based on weak feedback effect of birefringence dual frequency lasers has been presented and demonstrated. The experimental setup of an optical feedback dual-frequency laser is developed by using the phase delay between the optical feedback fringes of the two orthogonally polarized lights to realize displacement division and direction discrimina- tion. A concise theory is given to explain this experimental result. The sub-circuit is mainly composed of the 5-division ASIC, and the FPGA which is used to realize the signal 4-division. A novel displacement apparatus with a resolution of being as high as 15.8 nm, as well as the function of direction discrimination, can meet the demand of high-precision measurement. |
| |
| Keywords: | displacement measurement dual-frequency laser optical feedback subdivision |
| 本文献已被 维普 等数据库收录！ |
|
