ZnO薄膜的溶胶—凝胶法制备及其光学性质研究

采用溶胶—凝胶法分别在透明玻璃和Si衬底上制备出了ZnO薄膜。分别采用X射线衍射仪(XRD)、能量分散谱仪(EDS)、紫外可见分光光度计和荧光光谱仪对所制样品进行测试,研究了样品的结构特性、成分和光学特性。X射线衍射结果表明,所制备的ZnO薄膜为六角纤锌矿结构;ZnO薄膜的EDS能谱图表明薄膜包含O元素和Zn元素;透射光谱表明ZnO薄膜质量高,在可见光范围内具有较高的透射率,平均透射率在85%以上;吸收光谱表明在带隙处存在吸收边;从PL光谱观察到了显著的紫外发射峰。

Preparation of ZnO Thin Films by Sol-gel Method and Research of Optical Properties

ZnO thin films were prepared on transparent glass and silicon substrates by sol-gel method.The structure,composition,and optical properties of the samples were characterized by X-ray diffraction（XRD）,energy dispersive X-ray spectroscopy（EDS）,ultraviolet-visible light spectrophotometry and photoluminescence（PL） spectrum respectively.The XRD spectra show that ZnO thin films are of hexagonal wurtzite structure.The EDS spectra demonstrate there are O and Zn elements in the samples.The transmittance spectra reveal that the ZnO thin films are of high-quality and high transmittance（over 85%） in the visible region.The absorption spectra indicate that an absorption edge occurs at the wavelength corresponding to the band gap energy.An ultraviolet peak is observed in the PL spectra.