| 脉冲激光沉积 ZnO 薄膜的微结构及发光性能 |
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| 引用本文： | 李建华,勾治践,范希梅.脉冲激光沉积 ZnO 薄膜的微结构及发光性能[J].西南交通大学学报,2006,41(6):709-712. |
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| 作者姓名： | 李建华 勾治践 范希梅 |
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| 作者单位： | 1. 长春工业大学机电工程学院,吉林,长春,130012
2. 西南交通大学材料科学与工程学院,四川,成都,610031 |
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| 基金项目： | 国家重点基础研究司发展规划资助项目（2004CB619301） |
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| 摘 要： | 用波长为1064nm的Nd—YAG激光器，在氧的活性气氛中，通过激光烧蚀Zn靶在Si（111）衬底上获得ZnO薄膜．用电子显微镜（XRD和FESEM）表征ZnO薄膜的结构和表面形貌，用光致发光谱表征光学性质．实验中观察到紫外光发射和深能级的黄绿光发射．紫外光发射是ZnO薄膜的固有性质，深能级光发射是由于存在氧反位缺陷（OZn）．紫外光发射和深能级光发射的强度依赖于薄膜的表面粗糙度．表面粗糙度在nm级范围内的ZnO薄膜可以获得高强度的紫外光．
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| 关 键 词： | 氧化锌（ZnO）薄膜 脉冲激光沉积 紫外光致发光 X射线衍射 |
| 文章编号： | 0258-2724（2006）06-0709-04 |
| 收稿时间： | 2005-12-18 |
| 修稿时间： | 2005-12-18 |
Surface Morphology and Photoluminescence Properties of ZnO Films Deposited with PLD |
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| LI Jianhua,GOU Zhijian,FAN Ximei.Surface Morphology and Photoluminescence Properties of ZnO Films Deposited with PLD[J].Journal of Southwest Jiaotong University,2006,41(6):709-712. |
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| Authors: | LI Jianhua GOU Zhijian FAN Ximei |
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| Institution: | 1. School of Mechatronic Eng. ; Changchun University of Tech. , Changchun 130012, China; 2. School of Materials Science and Eng. , Southwest Jiaotong University, Chengdu 610031, China |
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| Abstract: | ZnO films were deposited on a Si(111) substrate by laser ablation of a Zn target in oxygen reactive atmosphere.Nd-YAG laser with wavelength of 1 064 nm was used as the laser source.The structure and surface morphology of the deposited ZnO films were characterized with XRD(X ray defraction) and FESEM(field emission scanning electron microscopy),and the optical properties of the films were characterized with photoluminescence.The UV(ultraviolet) and deep level(yellow-green) radiations were observed from the films.The UV radiation is the intrinsic property of ZnO film,and the deep level radiation is due to the existence of oxygen antisite defects(O_(Zn)).The intensity of UV and deep level radiations depend strongly on surface morphology and surface roughness of ZnO films.A strongly UV emission is obtainable from ZnO film with surface roughness in nanometer range. |
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| Keywords: | ZnO PLD UV photoluminescence X-ray diffraction |
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