| Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance |
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| 引用本文： | Fan Duojin Fan Duowang Wang Chenglong Liu Hongzhong. Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance[J]. 兰州交通大学学报, 2007, 26(6): 163-164 |
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| 作者姓名： | Fan Duojin Fan Duowang Wang Chenglong Liu Hongzhong |
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| 作者单位： | [1]Lanzhou Dachen Automatic Control System Co. , Ltd, Lanzhou 730070, China [2]key Laboratory of Opto-Electronic Technology and Intelligence Control,Ministry of Education, Lanzhou Jiaotong University, Lanzhou 730070,China [3]State Key Laboratory for Manufacturing Systems Engineering,Xi＇an Jiaotong University, Xi＇an 710049, China |
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| 基金项目： | Acknowledgement This work was supported by the National Science Support Program （2006BAE04B05-3）, MOE IRT （grant No. 06029）, National Science Foundation of China （grant No. 50505037）, 863 Hi-Tech Program （grant No. 2006AA04Z322 and ＂Qing Lan＂ Talent Engineering Funds by Lanzhou Jiaotong University）. |
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| 摘 要： | Experimental Procedure Fig.1 shows the custom-made Cathode Multi Arc Ion equipment,which is made up of three pars:CCS (computer contral system,Fig.1′s left part),Vacuum Chamber (Fig.1′s middle part) and Air Pump parts (Fig.1′s right part).
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| 关 键 词： | 钛氧化物 薄膜 阴极多相电极离子 制备 性能 |
| 文章编号： | 1001-4373（2007）06-0163-02 |
| 收稿时间： | 2007-09-23 |
| 修稿时间： | 2007-09-23 |
Preparation of TiOx Films by Cathode Multi Arc Ion and Its Performance |
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