| 高纯NF3气体管路系统的预处理 |
| |
| 引用本文： | 董露荣,付嫚.高纯NF3气体管路系统的预处理[J].舰船防化,2007(4):42-45. |
| |
| 作者姓名： | 董露荣 付嫚 |
| |
| 作者单位： | 中国船舶重工集团公司第七一八研究所 河北邯郸056027 |
| |
| 摘 要： | 高纯三氟化氮气体在电子工业中有着广阔的应用前景,在生产过程中常存在微粒子的污染问题,本文介绍了目前工业化生产三氟化氮(NF3)过程中微粒子产生的原因及几种不锈钢管路和阀门、附件的处理方法。
|
| 关 键 词： | 三氟化氮 微粒子 管路 处理 |
Pretreatment of the Pipeline for High Purity Nitrogen Trifluoride |
| |
| Dong Lu-rong, Fu Man.Pretreatment of the Pipeline for High Purity Nitrogen Trifluoride[J].Chemical Defence on Ships,2007(4):42-45. |
| |
| Authors: | Dong Lu-rong Fu Man |
| |
| Institution: | The 718th Research Institute of CSIC, Handan 056027, China |
| |
| Abstract: | Nitrogen Trifluoride has far-ranging applications in electronic industry. The problem of corpuscule pollution often occurs in the produce process. The reason for corpuscule pollution in industrialized production of Nitrogen Trifluoride, disposal method for pipeline and valve made by stainless steel are presented. |
| |
| Keywords: | Nitrogen trifluoride Corpuscule Pipeline Disposal |
| 本文献已被 CNKI 维普 等数据库收录！ |
