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Gas Expansion Process in the Dynamic Vacuum Calibration |
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| Authors: | CHENG Yongjun CHEN Shuping WANG Chenghong XI Zhenhua SUN Wenjun LIU Dan |
| Abstract: | By analyzing the gas expansion process from the upstream chamber via an orifice and a very rapid-opening ultra-high vacuum(UHV)gate valve to downstream one,the ... |
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