| Mirror Mapping of Laser Interferometer Measurement System on Ultra-precise Movement Stage |
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| 作者姓名： | 周云飞 于宝成 |
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| 作者单位： | School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China |
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| 摘 要： | The accuracy and repeatability of the laser interferometer measurement system （LIMS） are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultraprecise movement stage （UPMS） with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Dam processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm.
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| 关 键 词： | 激光干涉计测量系统 超精确运动级 镜像映射 镜像图 |
| 文章编号： | 1005-2429（2006）04-0355-08 |
| 收稿时间： | 2005-11-21 |
Mirror Mapping of Laser Interferometer Measurement System on Ultra-precise Movement Stage |
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| Zhou Yunfei,Yu Baocheng.Mirror Mapping of Laser Interferometer Measurement System on Ultra-precise Movement Stage[J].Journal of Southwest Jiaotong University,2006,14(4):355-362. |
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| Authors: | Zhou Yunfei Yu Baocheng |
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| Abstract: | The accuracy and repeatability of the laser interferometer measurement system (LIMS) are often limited by the mirror surface error that comes from the mirror surface shape and distortion. This paper describes a new method to calibrate mirror map on ultra-precise movement stage (UPMS) with nanopositioning and to make a real-time compensation for the mirror surface error by using mirror map data tables with the software algorithm. Based on the mirror map test model, the factors affecting mirror map are analyzed through geometric method on the UPMS with six digrees of freedom. Data processing methods including spline interpolation and spline offsets are used to process the raw sampling data to build mirror map tables. The linear interpolation as compensation method to make a real-time correction on the stage mirror unflatness is adopted and the correction formulas are illuminated. In this way, the measurement accuracy of the system is obviously improved from 40 nm to 5 nm. |
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| Keywords: | Laser interferometer measurement system (LIMS) Ultra-precise movement stage (UPMS) Mirror mapping Spline interpolation Mirror map data tables |
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