基于锁相解调的硅微谐振陀螺检测电路研究

给出一种硅微谐振式陀螺仪的结构，分析双端音叉谐振器（DETF）振动稳态信号的特性，研究其频谱分布。当调制系数β≤1时，可从稳态振动信号ωr0＋ωnr频率分量中提取被测信号信息。设计一种基于锁相（PLL）解调的硅微谐振陀螺检测电路方案，分析其解调原理，并利用Matlab进行仿真，结果验证了方案的可行性。

Research on Detecting-circuit for Silicon Micromechanical Resonant Gyroscope Based on PLL Demodulator

The structure of a silicon micromechanical resonant gyroscope was presented. The characte- ristics of stable vibrating signal of double-ended tuning fork （DETF） was analyzed, and the spectrum distribution was studied. When the modulation index, β, was far less than 1, the useful signal could be picked-up from the ωr0 ＋ωnr frequency components of sta- ble vibrating output of DETF. The scheme of detecting-circuit for silicon micromechanical resonant gyroscope based on Phase-Locked Loop （PLL） demodulator has been designed. The analysis of demodulation principle and the simulation with Matlab were made. The simulation results showed the effectiveness of the proposed method.