Monte Carlo simulation of electron swarms parameters in c-C4F8/CF4 gas mixtures |
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Authors: | Xue-li Liu Deng-ming Xiao Yan-an Wang Zhou-sheng Zhang |
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Institution: | (1) Department of Electrical Enginering, Shanghai Jiaotong University, Shanghai, 200240, China |
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Abstract: | The swarm parametes for c-C4F8/CF4 mixtures, including the density-normalized effective ionization coefficient, drift velocity and mean energy were calculated
using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied
between 150 and 500 Td, while the c-C4F8 content in gas mixtures is varied in the range of 0–100%. The value of the density-normalized effective ionization coefficient
shows a strong dependence on the c-C4F8 content, becoming more electronegative as the content of c-C4F8 is increased. The drift velocity of c-C4F8/CF4 mixtures is more affected by CF4. The calculated limiting field strength for c-C4F8/CF4 mixtures is higher than that of SF6/CF4.
Foundation item: the National Natural Science Foundation of China (No. 50777041) |
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Keywords: | electron swarm parameters c-C4F8/CF4 gas mixtures Monte-Carlo technique |
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