6英寸晶闸管的研究开发与特性控制

基于5英寸晶闸管设计与工艺制造技术，通过优化芯片参数，包括扩散杂质分布、光刻版设计、台面终端电场强度的控制及芯片封装结构的改进，设计并制造了用于特高压直流输电的，额定电流电压等级为4000A／8000V的6英寸晶闸管。采用电子辐照技术，实现了静态参数与动态特性的有效折衷。成功研制的这种器件具有短路电流高、动态特性好等特点，并在6英寸换流阀晶闸管测试试验平台上进行了各种试验和检验。

R&D and Characteristic Control of 6-inch Thyristors

Based on the design and manufacture technology of 5-inch thyristors, 6-inch 4 000 A/8 000 V thyristors for UHVDC have been developed by optimizing the parameters of the wafers, the diffusion distribution, the design of photomask, the control.of terminal electric field intensity, as well as the packaging structure. The satisfying compromise between the static parameters and the dynamic characteristics is realized by adopting electron irradiation technology. The test platform for 6-inch thyristor in converter valve has been set up and the test and study for 6-inch 4 000 A/8 000 V thyristor have been carried out.