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光化学蚀刻在增益发生器加工中的应用前景
引用本文:傅玉婷,巴俊州,蒋亚雄,颜飞雪,李少华.光化学蚀刻在增益发生器加工中的应用前景[J].舰船防化,2009(3):6-11.
作者姓名:傅玉婷  巴俊州  蒋亚雄  颜飞雪  李少华
作者单位:中国船舶重工集团公司第七一八研究所;
摘    要:增益发生器是化学激光器的关键部件之一。为了提高激光光束的质量和激光器的工作性能,本文从增益发生器的加工工艺出发,简单的介绍了传统工艺及其优势与劣势,在此基础上提出了光化学蚀刻与扩散焊结合的新工艺及其优势。重点总结了光蚀刻工艺效果的影响因素及其解决方案。

关 键 词:增益发生器  新工艺  光化学蚀刻  

Application of Photo Chemical Matching in the Processes of Gain Generator
Fu Yu-ting,Ba Jun-zhou,Jiang Ya-xiong,Yan Fei-xue,Li Shao-hua.Application of Photo Chemical Matching in the Processes of Gain Generator[J].Chemical Defence on Ships,2009(3):6-11.
Authors:Fu Yu-ting  Ba Jun-zhou  Jiang Ya-xiong  Yan Fei-xue  Li Shao-hua
Institution:The 718th Research Institute of CSIC;Handan 056027;China
Abstract:Gain generator is one of the key part of the chemical laser. In order to improve the quality of the beam and the operating performances of the laser, based on the processes of gain generator, the traditional processes were intorduced as well as their strongpoints and faults, and a new process that photo chemical matching combined with disuffion bonding and their advantages was put forward. Some factors and solutions were systemically discussed.
Keywords:Gain generator  New process  Photo chemical matching  
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