Nc-Si Thin Film Deposited at Low Temperature and Nc-Si Heterojunction Solar Cell

This paper reported some results about intrinsic nanocrystalline silicon thin films deposited by high frequency (HF) sputtering on p-type c-Si substrates at low temperature. Samples were examined by atomic force microscopy (AFM), X-ray diffraction (XRD), infrared absorption, and ellipsometry. XRD measurements show that this film has a new microstructure, which is different from the films deposited by other methods. The ellipsometry result gives that the optical band gap of the film is about 2.63 eV. In addition, the n-type nc-Si :H/p-type c-Si heterojunction solar cell, which has open circuit voltage (Uoc) of 558 mV and short circuit current intensity (Isc) of 29 mA/cm^2, was obtained based on the nanocrystalline silicon thin film. Irradiated under AM1.5, 100 mW/cm^2 light intensity, the Uoc, Isc, and FF can keep stable for 10 h.     

Nc-Si Thin Film Deposited at Low Temperature and Nc-Si Heterojunction Solar Cel

IntroductionMuchworkhasbeendonetostudythestruc-tureandpropertiesofthehydrogenatednano-crystallinesilicon(nc-Si∶H)thinfilmsinthepastfewyears[1～3].Ithasbeenreportedthatthesefilmshavemanygoodopticalandelectricalproper-ties[4～6].Severaldepositiontechniqueshavebeenestablishedtopreparenc-Si∶Hthinfilms,includ-ingplasmaenhancedchemicalvapordeposition(PECVD),hotwirechemicalvapordeposition(HWCVD)[7,8]andreactivemagnetronsputter-ing[9]withthesubstratetemperaturevaryingfrom150to250°C.Comparedwi…