有机衬底上射频磁控溅射制备ITO薄膜的研究

Introduction Indium tin oxide (ITO) film has been widely used as a transparent conductor due to its high transparency to visible light and its low electrical resistivity. ITO film can be prepared by many techniques, including thermal evaporation deposition, magnetron sputtering, electron beam evaporation, spray pyrolysis,chemical vapour deposition,dip-coating techniques,and later developed pulsed laser deposition method.