A Micro-Electro-Mechanical System-Based Bulk Acoustic Wave Piezoelectric Disk Resonator for Detecting z-axis Rotation Rate

This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.     

Design of Braunbeck Coil for Nuclear Magnetic Resonance Gyro Magnetic Field Excitation

For generating a uniform and steady magnetic field, Helmholtz coil is extensively used in nuclear magnetic resonance gyro (NMRG). Unfortunately, the volume of Helmholtz coil makes it inconvenient to miniaturize NMRG. This study introduces Braunbeck coil that can be used in magnetic field excitation system. Braunbeck coil can produce homogeneous magnetic field within a limit space, and occupy a small volume. In addition, this study presents mathematical expressions that can be used to calculate the area of uniform magnetic field. Experimental test verifies the effectiveness of the proposed design, and the results accord closely with the actual simulation.