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Microporoussilicafilmswithspecialpropertiesareexpectedtobeusedinmanyfields,suchasopticalcoat ing[1 ] ,sensor,membrance[2 ] ,anddielectricfilm[3 ] .Itslowsoundspeedandacousticdelayorhigherratiosoundinsulatingmaybeusedasultrasounddetector[4] .Theexcellentfeaturesofinsulatingpropertyanditsnearper fectinterfaceonsiliconcouldplayakeyroleinsuccessofverylargescaleintegrated(VLSI)devices[5\〗,etc.Intheotheraspects,nanoporoussilicafilmsarebeingusedinseparationtechnology[6] ,molecularengineering,andbi… 相似文献
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