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Cluster tools have advantages of shorter cycle times, faster process development, and better yield for less contamination.
The sequence of dual-arm cluster tools is a complex logistics process during the semiconductor production. Efficient use of
cluster tools is naturally very significant to competitive fab operations. Generating an optimized sequence in a computationally
efficient manner and assessing the quality of the requirements to improve the fab production are the key factors for semiconductor
manufacturing productivity. The Petri net modeling is introduced to minimize the makespan of the process for the three different
logical modes and select a better mode after comparing the makespan among the three logical modes. The tool sequence optimization
problem is formulated as optimization firing transition sequences based on the Petri net and then the formulation is converted
to be linearly solved by the branch-and-cut method in the standard commercial solver CPLEX. Special methods for the linear
conversion are highlighted. Due to the limited calculation time requirement for the real production and the large scale of
the problem, special methods for the efficiency tuning are applied according to the characteristics of the problem. Numerical
testing is supported by one of the most advanced semiconductor enterprises and the computational results show significant
improvement compared with the traditional manual sequence results. 相似文献
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文章分析了公路行业采用PPP项目模式的发展历程,结合实例对常用的BOT和ROT运作模式进行了剖析,并从统筹协调推进PPP项目、契约化管理、绩效评价等方面,对公路行业PPP项目模式持续稳定发展提出了建议. 相似文献
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从改扩建公路工程实际来说,新旧路基衔接施工,若没有做好有效处理,极易发生不均匀沉降问题或者其他问题,影响着公路使用性能,因此需要做好严格把控。现针对改扩建新旧路基衔接处施工作业的质量把控,做简单的论述,总结施工质量控制策略,共享给相关人员参考。 相似文献
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针对高速公路检测工作,结合相关工作经验,对路面破损检测、平整度检测、强度检测,以及当前先进可行的地质雷达检测与地震映像检测几种检测方法进行深入分析,提出不同检测方法的特点优势及适用范围,并对当前重要的公路预防性养护理念和步骤进行分析,以此为切实做好高速公路检测与预防养护工作提供可靠的参考依据。 相似文献
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作为一项重要的建筑节能技术,相变储能技术可解决建筑能源供求在时间、空间和强度上不匹配的矛盾.综述了建筑储能相变材料的制备与导热性能增强、相变单元传热特性及传热强化、建筑相变储能系统的研发与应用,总结了材料研发、系统性能评估、系统应用技术开发等3个方面的不足,指出了未来研究重点,即开发性能稳定且蓄放热能力强的相变材料、有效预测多物理过程和多相态储能系统的动态性能和实现无人工干预条件下储能系统的自主有效运行等. 相似文献
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