A Micro-Electro-Mechanical System-Based Bulk Acoustic Wave Piezoelectric Disk Resonator for Detecting z-axis Rotation Rate

This paper presents a bulk acoustic wave piezoelectric disk resonator based on a special pair of degenerative modes, to detect z-axis angular velocity. A single piezoelectric disk is operated in its appropriate modes in the k Hz frequency range to achieve this function. This design combines the bulk acoustic wave drive/sense mode with lead zirconate titanate resonator which improves device's performance and simplifies its structural complexity. The operation principle of piezoelectric disk resonator is given and validated by finite element method,and the scale factor of piezoelectric disk resonator is 0.977 μV/[(°) · s-1] without any amplification section.The results of impedance analysis for the prototype in the air, which is fabricated on lead zirconate titanate wafer by Micro-Electro-Mechanical System process, show that the resonant frequency of the piezoelectric disk resonator is about 190 k Hz. Moreover, the measured frequency split between drive and sense mode is about290 Hz without any tuning methods. At last, a closed-loop driving and detecting circuit system is designed and its modulation/demodulation method is studied, preliminary experiments show that this device is not sensitive to acceleration, but is sensitive to angular velocity, its performance parameters need follow-up experiments.     

车上面容

一般都是一副倦容。蜷缩在一定没有多宽敞的驾驶舱,注意力必须始终高度集中,手脚并用程度只有鼓手可以超越,快时是一种累,慢慢爬行时又是、更是一种累。公车乘客,也往往不轻松,那么不舒适的BUS,其他"国际化大都市"可不多。路口遇到红灯,怎不可以出出神?目光涣散,当是情理中事。     

基于仿生鳍的两栖驱动机构运动分析

为证实一种新型两栖驱动机构合理,并为之后研究提供基础,通过运用有限体积法,将柔性三维薄板视为仿生鳍鳍进行模拟分析,在水下环境中具体研究了振幅、周期等参数对仿生鳍运动的影响并分析推进原理,发现仿生鳍运动模式与马陆倍足运动方式基本一致。陆地上的研究通过建立运动学、动力学方程进行分析。结果表明,在水下仿生鳍单参数变量为振幅时主要影响运动的最大速度,与速度呈正比关系;为周期时影响加速度,与之呈正比关系;而推进效果是由仿生鳍两侧高、低压中心产生的正压梯度所提供。在陆地上仿生鳍的约束力足以提供运动所需驱动摩擦力,从而证明仿生鳍不仅可在水中进行巡游,而且通过调整结构姿态可实现在陆地的运动,由一套驱动机构实现了两栖运动功能。